Low-Cost, High-Volume Scale-Up of CVD Films and Nano-Structured Materials for Industrial Applications
Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA
Graphene, carbon nanotubes (CNTs), silicon nanowires (SiNWs) and many other nanomaterials and thin films can be produced on flexible, often metallic, substrates using chemical vapour deposition (CVD) based processing. CVD tools can be implemented in many different ways to produce a wide range of material compositions and geometries (OD, 1D, 2D and 3D).
Most traditional style CVD tools are limited in production volume