Towards Industrial Scale Production of CVD Graphene

Riju Singhal1, Mathieu Monville1, Samuel Wright1, Karlheinz Strobl1
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA


In recent years, exceptional physical and chemical properties of graphene have been demonstrated and widely acknowledged. Graphene films synthesized by Chemical Vapor Deposition (CVD) with different configurations (monolayer, bilayer, multilayer, etc.) and grain sizes (up to cm size) were developed to offer a wide range of electrical and chemical properties facilitating their application in several fields. This led to numerous investigations on the potential use of CVD graphene for fabrication of electronic devices (sensors, flexible touch screens, etc.).

One of the remaining key challenges for the induction of CVD graphene as a commercially viable material for a wide range of applications, including consumer products, is the development of a low cost, high volume production method with high spatial control over its physical configuration (# of layers, size of individual grains, defect density, etc.). Numerous research groups have already demonstrated successful and reproducible synthesis of graphene on labscale with many different process conditions. However, only few attempts have been made thus far to scale up CVD graphene production to an industrially relevant scale or to incorporate these previously developed methods. Previous “scale-up” methods were based primarily on in-line roll-to-roll system designs. However this method is typical limited in total throughput, flexibility in reactor design, graphene cost per area and can only operate in a narrow processing window. Further roll to roll CVD systems typically have a high design/process and system development cost. In this work we present first results of a novel batch process CVD system alternative that allows a quicker and less costly scale-up than previously developed CVD processing innovations. It also promises to require lower scale-up development costs and lower capital and consumable costs. For example, our process technology allows to CVD process a Cu foil roll (up to 30 m long) at a capacity of up to ~100 m2/day in our CVD EasyGraphene® 300 tool platform that has a 330 mm ID. First results of this new CVD graphene scale-up effort will be presented and compared with those of the CVD graphene generated on lab-scale in a traditional CVD tube furnace system.


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Presented by Riju Singhal at MRS Fall 2014 Meeting in Boston, MA