Cost Efficient Scale-Up of CVD Graphene and Nanomaterials

Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA

Abstract

Graphene and other 2D materials can be produced by chemical vapor deposition (CVD) processing.  CVD processing can also be used to manufacture many 1D nanomaterials such as carbon nanotubes and silicon nanowires as well as for a wide range of film depositions and other related surface modifications.  The related CVD substrates can be rigid or flexible, and can be in continuous rolls or discrete stacks.

Industrial CVD production equipment based on in-line continuous or roll to roll processing tends to have large associated development and capital costs.  These systems are typically developed and manufactured with a series of frozen sequential process steps and a specific line speed in mind.  At its best this leads to a narrow process window for unique manufacturing equipment.  Investments in in-line CVD equipment rarely reach their full return on investment. Therefore, many processes and applications developed by universities and startup companies are not commercialized.

As an alternative to in-line CVD processing equipment solutions, we present a novel, multiple patent pending, batch processing platform.  Customization of this platform enables low cost, high volume scale-up of a wide variety of CVD processes.  In particular it can be used for CVD graphene production on rolls of Cu foil, for vertically aligned CNT or Si nanowire growth on roll of stainless steel foil as well as for many other CVD surface modifications of rigid and flexible substrate materials.  Our estimate is that for a wide range of CVD processing needs a 5X throughput improvement and a 2-3X capital cost reduction is possible compared to in-line systems. In addition our solution provides increased process flexibility, a greater ease of recipe transfer, and lower operational costs.   Besides enabling the processing of rolls of flexible substrate rolls this solution is also suitable for parallel CVD processing of stacks of substrates.

Our CVD batch processing platform offers a cost efficient and more direct scale-up route for processes developed using R&D CVD systems.  Our batch CVD scale-up platform can be applied to many CVD processes, with the potential to accelerate the commercialization of nanomaterial and 2D material innovations.

Presentation

Presented by Karlheinz Strobl at Graphene LIVE 2D Materials 2014 in Santa Clara, CA