CVD graphene: Batch versus Roll to Roll Scale-up

Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA


Process development for CVD graphene is typically being done on Cu or Ni substrates in a CVD tube furnace system.  Traditionally such systems allow only limited production volume as a result of the size constraints of the substrates that can fit inside a given process chamber.  Therefore, in order to commercialize applications enabled by CVD graphene films, new scale up solutions need to