Posts Tagged ‘CVD Films’

Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA

Abstract

Graphene, carbon nanotubes (CNTs), silicon nanowires (SiNWs) and many other nanomaterials and thin films can be produced on flexible, often metallic, substrates using chemical vapour deposition (CVD) based processing. CVD tools can be implemented in many different ways to produce a wide range of material compositions and geometries (OD, 1D, 2D and 3D).

Most traditional style CVD tools are limited in production volume

Elena Polyakova1, Daniil Stolyarov1, Wei Zhang2, Karlheinz Strobl2
1Graphene Laboratories Inc., 5 Archstone Cir. Suite 202, Reading, MA 01867
2CVD Equipment Corporation, 1860 Smithtown Ave, Ronkonkoma, NY 11779

Abstract

Continuous interest in Graphene materials has been recently reinforced with the awarding of the Nobel Prize in Physics, 2010. Graphene materials are considered for use in a wide variety of practical applications including electronics, solar cells, MEMS and NEMS, as well as chemical and biological sensors. Our joined team has successfully grown graphene films on Ni and Cu using Chemical Vapor