20
November
Low-Cost, High-Volume Scale Up of CVD Graphene
Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum
CVD Equipment Corporation, 355 S. Technology Drive, Central Islip, New York 11722, USA
Abstract
CVD graphene grown on Cu or Ni film coated Si wafers or flexible Cu foil substrates is a promising starting material for many novel product developments efforts. Small scale CVD graphene production has traditionally been accomplished in CVD tube furnace systems. Such systems allow for a limited production volume as a result of the size constraints of the substrates that can fit inside